SEMICONDUCTOR MANUFACTURER CLEAN ROOMS

MASSACHUSETTS

CHALLENGE

Our client is a global leader in materials engineering solutions in the semi-conductor and photovoltaic industries. Nearly all of the final tool assembly, testing, and R&D work is done in controlled clean room environments ranging in classification from Class 10,000 to 10. They sought reduced energy costs and improved HVAC control while maintaining rigorous clean room standards.

OPPORTUNITY

B2Q identified energy efficiency and performance improvements, quantified project economics, and calculated utility incentives. Using design and particle count data, recent balancing reports, occupancy level profiles, and gowning practices, B2Q reduced recirculation and make-up airflows in clean rooms and assembly areas. In office areas, we shut down and set-back air handlers running unnecessarily 24/7. B2Q utilized power metering equipment, TMY3 weather data, and particulate and duct airflow measurements to establish baseline cooling and fan load energy profiles. Each space’s allowable airflow reductions were determined using actual particle count data, occupancy levels, and ISO/ASHRAE requirements for particle counts and ventilation air.

RESULT

Custom clean room measures included setting recirculation and make-up unit drive speed to meet predetermined airflow rates, then actively resetting within defined bandwidth based on new return air particulate sensor feedback. Non-clean room measures included reduced airflows based on occupancy levels and shutting down air handlers nights and weekends. Total annual energy savings were calculated at more than 2.0M kWh and 50,000 therms. The project qualified and received more than $500,000 in utility incentives which brought the return on investment to approximately 50%.

Market:

Industrial

Services:

Building Systems
Energy Efficiency and Analysis